| 1. Introduction |
|
 |
| |
The CMT-SR1000N is a measurement
system for Sheet Resistance and Resistivity of Wafer,
LCD, ITO, Solar cell, Fuel cell samples.
Measurement is simply completed by pressing the
START BUTTON only, and the measurement value is
displayed on the LCD display window of the system.
|
|
| 2. Features |
|
 |
Automatic contact system(Center 1 point) |
|
|
Automatic range selection |
|
|
|
Data communication port & software |
|
|
| 3. Configuration |
|
|
|
The system consists of the following components. |
|
|
|
4-point probe head unit |
|
|
|
Z-axis robot arm |
|
|
|
Membrane keyboard panel |
|
|
|
LCD display window |
|
|
|
Data communication port |
|
|
|
Data download Software |
|
|
|
Standard accessories |
|
|
|
- Power cable
- Data communication cable
- Operating & service manual
|
|
|
| 4. Specifications |
|
|
|
Sheet resistance measurement |
|
|
|
- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ¡ 2 Mohm/sq
- Measuring point : Center 1 point
|
|
|
|
Resistivity measurement |
|
|
|
- Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 ¥ìohm¡¤cm ¡ 200.0 kohm¡¤cm (VLSI standard wafer)
- Measuring point : Center 1 point |
|
Current source |
|
|
|
- 10nA to 100mA
- DVM 0V to 2,000mV
- Accuracy: 0.2 %
|
|
|
|
Measurement accuracy |
|
|
|
- ¡¾0.5 % (standard wafer, when 23¡ÆC) |
|
|
|
Four point probe (Jandel Eng.) |
|
|
|
- Pin spacing : 20 mils ¡ 50 mils
- Pin Load : 10 gram/pin ¡ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron |
|
|
|
Software |
|
|
|
- Windows 98/XP/NT Version
- Data save & load
- Data printout
- Use RS232C Communication Port
|
|
|
| 5. Specimen |
|
|
|
Circle type (wafer) : max 8" |
|
|
|
Rectangular type : max 140 mm ¡¿ 140 mm |
|
|
| 6. Measuring
time |
|
|
|
Approx. 3 ¡¾ 1 sec/point |
|
|
| 7. Software |
|
|
|
Operating personal computer : IBM
PC/AT compatible |
|
Connect com port of PC and data com
port of CMT-SR1000N |
|
Data save & load |
|
|
|
Data printout |
|
|
| 8. Utility requirements |
|
|
|
Power requirements |
|
|
|
- Line voltage : AC 110V or 220V ¡¾ 10%
- Electric power : 40 W, 500 mA
- Line frequency : 60 Hz
|
|
|
| 9. Outside Dimension |
|
|
|
254mm(W) ¡¿ 562mm(D) ¡¿ 250mm(H) |
|
|
| 10. Operating environment |
|
|
|
Temperature range : 23¡Æ¡¾ 1¡ÆC |
|
|
|
Relative humidity : 30 % ¡ 70 % |
|
|
|
Avoid placing the system near a source of RFI, vibration and sources of gas. |
|
Avoid large changes in temperature. |
|
|
|
|
|
|
CMT-SR1000N