| 1. Introduction |
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The CMT-SR2000N is a fully automatic system to
measure Sheet Resistance and Resistivity of Silicon
Wafer. This system can be operated by itself, furthermore,
perfect remote control is available using a PC and
exclusive software, and it gives various data analyses. |
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| 2. Features |
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X,Y,Z-axis fully automatic system |
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Auto & Manual range selection |
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Systems for 8" or 140X140mm |
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Perfect remote control by operating software |
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Data analysis (2D, 3D map, Data map, etc.) |
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ASTM & SEMI quick measurement mode |
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| 3. Configuration |
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The system consists of the following components. |
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JANDEL 4-point probe head |
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Z-axis robot arm |
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Revolution sample stage chuck (X,Y-axis) |
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Membrane keyboard panel |
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LCD display window |
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Remote control communication port |
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Vacuum hose connector (200mmHg) |
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Software (Windows Ver.) |
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Standard accessories |
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- Power cable
- Remote control communication cable
- Operating manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ¡ 2 Mohm/sq
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Resistivity measurement |
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- Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 ¥ìohm¡¤cm ¡ 200.0 kohm¡¤cm
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Electronic accuracy |
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- ¡¾ 0.5 % (Precision resistor) |
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4-point probe (Jandel Eng.) |
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- Pin spacing : 25 mils ¡ 50 mils by 5mil increments
- Pin Load : 10 gram/pin ¡ 250 gram/pin
- Pin radius : 12.5 micron¡500 microns (polished 2¥ì diamond)
- Tolerance : ¡¾ 0.01 mm
- Needles : Solid Tungsten Carbide ¥õ0.40 mm
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Operating software |
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- Measurement condition creation : Wafer type, measure point interval, etc.
- Save & load : data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum
- Data & mapping printout
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Measurement mode (S/W) |
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-Auto measurement : Point interval designation by user
-Quick measurement : ASTM & SEMI mode
-Point measurement : Appointment on wafer by mouse
-Manual measurement : Appointment on wafer by arrow key |
| 5. Specimen |
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Sample : max 8" or 140X140mm |
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| 6. Measuring time |
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Approx. 2 ¡¾ 1 sec/point |
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| 7. Software
[Windows ver.)] |
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Operating personal computer : IBM PC/AT compatible PENTIUM¡ |
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Communication port |
| 8. Utility requirements |
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Power requirements (1 Line) |
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- Line voltage : AC 100 ~ 220V ¡¾ 10%
- Electric power : 40 W, 500 mA
- Line frequency : 50 / 60 Hz
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Stage chuck vacuum requirements (1 Line) |
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- Vacuum : About 200mmHg (1 Line)
- Vacuum hose : Urethane 4mm
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| 9. Outside Dimension |
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254mm(W)¡¿562mm(D)¡¿250mm(H) |
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| 10. Operating environment |
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Temperature range : 23¡Æ ¡¾ 1¡ÆC |
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Relative humidity : 30 % ¡ 70 % |
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Avoid placing the system near a source
of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
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CMT-SR2000N